000			02603nam a2200409 a 4500
001			EBC775091
003			MiAaPQ
006			m o d |
007			cr cn|||||||||
008			110209s2011 enka sb 001 0 eng d
010			_z 2011004247
020			_z9780521889254 (hardback)
020			_z9781107645790 (pbk.)
020			_z9781139114257 (e-book)
035			_a(MiAaPQ)EBC775091
035			_a(Au-PeEL)EBL775091
035			_a(CaPaEBR)ebr10502663
035			_a(CaONFJC)MIL329560
035			_a(OCoLC)759114739
040			_aMiAaPQ _cMiAaPQ _dMiAaPQ
050		4	_aTK7875 _b.K83 2011
082	0	4	_a621.381 _222
100	1		_aKubby, Joel A.
245	1	2	_aA guide to hands-on MEMS design and prototyping _h[electronic resource] / _cJoel Kubby.
260			_aCambridge ; _aNew York : _bCambridge University Press, _c2011.
300			_axi, 166 p. : _bcol. ill.
504			_aIncludes bibliographical references and index.
505	8		_aMachine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.
520			_a"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"-- _cProvided by publisher.
533			_aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650		0	_aMicroelectromechanical systems.
655		4	_aElectronic books.
710	2		_aProQuest (Firm)
856	4	0	_uhttps://ebookcentral.proquest.com/lib/bcsl-ebooks/detail.action?docID=775091 _zClick to View
999			_c754371 _d754371